Title:
INTEGRATED SEMICONDUCTOR COMPONENT FOR CONDUCTING HIGH-FREQUENCY MEASUREMENTS AND THE USE THEREOF
Document Type and Number:
WIPO Patent Application WO2003041117
Kind Code:
A3
Abstract:
The invention relates to an integrated semiconductor component for conducting high-frequency measurements and to the use thereof. According to the invention, the semiconductor component is part of a semiconductor circuit (10) (SOI wafer), comprised of a first silicon layer (12), of a silicon oxide layer (insulating layer (14)) connected thereto, and of a subsequent additional silicon layer (structural layer (16)). The semiconductor component is comprised of an IMPATT oscillator (30) provided with a resonator (24), which contains a metallized silicon cylinder (18) mounted in the structural layer (16), a coupling disk (28) that covers the cylinder (18) in the area of the first layer (12), and an IMPATT diode (32) that is connected to the cylinder (18) of the resonator (24) via a recess (38) of the coupling disk (28). The semiconductor component is also comprised of a reference oscillator (46) of a lower frequency provided with a resonator (24), which contains a metallized silicon cylinder (18) mounted in the structural layer (16), a coupling disk (28) that covers the cylinder in the area of the first layer (12), and a microwave conductor that is connected to the cylinder (18) of the resonator (24) via a recess (38) of the coupling disk (28). The reference oscillator serves to stabilize the frequency of the IMPATT oscillator (30) via an active oscillator circuit (58). The semiconductor component additionally comprises a receive mixer provided with integrated Schottky diodes and comprises a transmitting/receiving antenna.
Inventors:
SCHMIDT EWALD (DE)
PFIZENMAIER HEINZ (DE)
IRION HANS (DE)
HASCH JUERGEN (DE)
PFIZENMAIER HEINZ (DE)
IRION HANS (DE)
HASCH JUERGEN (DE)
Application Number:
PCT/DE2002/003004
Publication Date:
September 18, 2003
Filing Date:
August 16, 2002
Export Citation:
Assignee:
BOSCH GMBH ROBERT (DE)
SCHMIDT EWALD (DE)
PFIZENMAIER HEINZ (DE)
IRION HANS (DE)
HASCH JUERGEN (DE)
SCHMIDT EWALD (DE)
PFIZENMAIER HEINZ (DE)
IRION HANS (DE)
HASCH JUERGEN (DE)
International Classes:
H01L21/822; G01S7/03; G01S13/08; H01L23/66; H01L27/04; H01L29/864; H01P7/04; H01Q9/04; H01Q19/06; H01Q23/00; H03B9/14; (IPC1-7): G01S7/03
Foreign References:
| DE19931928A1 | 2001-01-11 | |||
| EP0978729A2 | 2000-02-09 | |||
| EP0995126A1 | 2000-04-26 |
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