Title:
ION ANALYZER
Document Type and Number:
WIPO Patent Application WO/2021/053865
Kind Code:
A1
Abstract:
This ion analyzer comprises: a radical generating unit having a reaction chamber 2 into which precursor ions originating from a sample component are introduced, an insulated tube 551, and a discharge unit 54, 552 configured to cause an electric discharge inside the insulated tube; gas supply units 52, 53 capable of supplying a first gas and a second gas to the inside of the insulated tube, the first gas being a radical source gas and the second gas being one of oxygen gas, ozone gas, nitrogen gas, a gas of a compound containing oxygen atoms or nitrogen atoms, and a noble gas; a vacuum exhaust unit 57 configured to exhaust the inside of the insulated tube; a radical introducing unit 55 configured to introduce radicals to the inside of the reaction chamber; and a control unit 93 configured to execute a first operation and a second operation. The first operation: generates radicals by introducing the first gas to the inside of the insulated tube and causing electric discharge; and introduces the radicals to the inside of the reaction chamber. The second operation introduces the second gas to the inside of the insulated tube.
Inventors:
TAKAHASHI HIDENORI (JP)
TANAKA KOICHI (JP)
TANAKA KOICHI (JP)
Application Number:
PCT/JP2020/016269
Publication Date:
March 25, 2021
Filing Date:
April 13, 2020
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
H01J49/00; H01J49/26
Domestic Patent References:
| WO2018186286A1 | 2018-10-11 | |||
| WO2015025008A1 | 2015-02-26 |
Foreign References:
| JP2019056598A | 2019-04-11 |
Attorney, Agent or Firm:
KYOTO INTERNATIONAL PATENT LAW OFFICE (JP)
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