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Patent Searching and Data


Title:
ION DETECTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/195062
Kind Code:
A1
Abstract:
The present invention implements an ion detecting device with which it is possible to avoid direct collisions of negative ions with a scintillator, prevent degradation of the scintillator, prolong life of the scintillator, reduce the need for maintenance, and perform highly sensitive detection of both positive and negative ions. A center point 66 of a negative ion CD 53 and a center point 67 of a scintillator 56 are disposed in opposing regions with respect to a reference line 65 that connects a center point 63 of a positive ion CD 52 with a center point 64 of a counter electrode 54. Positive ions entering from an ion entrance port 62 receive a deflecting force and collide with the positive ion CD 52, and secondary electrons that are generated collide with the scintillator 56 to generate light, pass through a light guide 59, and are detected by a photomultiplier 58. A negative potential barrier is created along the reference line 65, negative ions entering from the ion entrance port 62 are drawn toward and collide with the negative ion CD 53, positive ions that are generated collide with the positive ion CD 52, and secondary electrons that are generated collide with the scintillator 56 and are detected by the photomultiplier 58.

Inventors:
YOSHINARI KIYOMI (JP)
SUGIYAMA MASUYUKI (JP)
HASHIMOTO YUICHIRO (JP)
IMAMURA SHIN (JP)
Application Number:
PCT/JP2020/002073
Publication Date:
October 01, 2020
Filing Date:
January 22, 2020
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J43/06; G01N27/62; H01J49/06
Domestic Patent References:
WO2008025135A12008-03-06
Foreign References:
JPH10154483A1998-06-09
JPH01304649A1989-12-08
JP2012049110A2012-03-08
JPS63276862A1988-11-15
US20090294654A12009-12-03
JPS60143759A1985-07-30
JP2001351566A2001-12-21
JPS5818542B21983-04-13
Other References:
See also references of EP 3951833A4
Attorney, Agent or Firm:
KAICHI IP (JP)
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