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Title:
ION GUN
Document Type and Number:
WIPO Patent Application WO/2021/049175
Kind Code:
A1
Abstract:
This ion gun is provided with: an anode; a magnetic pole that includes an inner surface facing the anode, a slit disposed at a position corresponding to the anode, and an inner oblique surface extending from one end of the inner surface toward the slit and forming a part of the slit; and a cover that covers at least part of the inner surface and the inner oblique surface, that is formed from an electrically conductive and non-magnetic material, and that can be removed from and attached to the magnetic pole.

Inventors:
YUZE TAKUMI (JP)
Application Number:
PCT/JP2020/028200
Publication Date:
March 18, 2021
Filing Date:
July 21, 2020
Export Citation:
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Assignee:
ULVAC INC (JP)
International Classes:
H01J37/08; H01J27/02
Foreign References:
US20080073557A12008-03-27
JP2014222597A2014-11-27
Attorney, Agent or Firm:
OIKAWA Shu et al. (JP)
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