Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ION SOURCE AND MULTI-ION GENERATOR INCLUDING SAME
Document Type and Number:
WIPO Patent Application WO/2020/203186
Kind Code:
A1
Abstract:
An ion source according to the present invention comprises: an electron source (101); an anode electrode (102) and a cathode electrode (103) for extracting a hollow electron beam (EB) from the electron source (101); a drift tube (105) surrounding a passage region (104) for the extracted hollow electron beam (EB); a repeller (106) for reversing the traveling direction of the hollow electron beam (EB) that has passed through the passage region (104) toward the electron source (101); and a gas supply means for supplying a source gas to the passage region (104), wherein the electron source (101), the anode electrode (102), the repeller (106), and the gas supply means are all located outside the drift tube (105).

Inventors:
KATAGIRI KEN (JP)
WAKUI TAKASHI (JP)
Application Number:
PCT/JP2020/011145
Publication Date:
October 08, 2020
Filing Date:
March 13, 2020
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NATIONAL INSTITUTES FOR QUANTUM AND RADIOLOGICAL SCIENCE AND TECH (JP)
International Classes:
G21K5/04; H01J27/20
Foreign References:
JPH02168541A1990-06-28
JPH07169428A1995-07-04
JPS60240039A1985-11-28
JP2015008127A2015-01-15
Other References:
TAKAHASHI, KATSUYUKI ET AL.: "Switching Technique of Ion Species with Gas Pulsing Method at NIRS-HEC Ion Source for Multi-Ion Irradiation", PROCEEDINGS OF THE 15TH ANNUAL MEETING OF PARTICLE ACCELERATOR SOCIETY OF JAPAN, 2018, pages 408 - 412
Attorney, Agent or Firm:
TANAI Sumio et al. (JP)
Download PDF: