Title:
IONIC-GROUP-CONTAINING MICROBALLOON AND PRODUCTION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2021/117837
Kind Code:
A1
Abstract:
A microballoon according to the present invention is a microballoon comprising polyurethane (urea), and is characterized by having ionic groups on the inner surface of the microballoon. With the present invention, it is possible to provide a microballoon that, as a result of being used in a CMP polishing pad, enhances the affinity with a polishing slurry liquid and that can exhibit good polishing characteristics without lowering the strength of a resin in the polishing pad.
Inventors:
SHIMIZU YASUTOMO (JP)
KAWASAKI TAKAYOSHI (JP)
KAWASAKI TAKAYOSHI (JP)
Application Number:
PCT/JP2020/046169
Publication Date:
June 17, 2021
Filing Date:
December 10, 2020
Export Citation:
Assignee:
TOKUYAMA CORP (JP)
International Classes:
C08G18/00; B01J13/16; B24B37/24; C08G18/08; C08G18/30; C08G18/32
Domestic Patent References:
| WO2019198675A1 | 2019-10-17 | |||
| WO2018092826A1 | 2018-05-24 |
Foreign References:
| JP2012512933A | 2012-06-07 | |||
| US20150231589A1 | 2015-08-20 | |||
| CN108219110A | 2018-06-29 | |||
| JP2004534870A | 2004-11-18 |
Attorney, Agent or Firm:
TAGUCHI, Masahiro et al. (JP)
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