JOINED BODY AND ELECTROSTATIC CHUCK

WIPO Patent Application WO/2021/261284

A1

This joined body comprises a plate-form first member, a flat plate-form second member, and a joining part that is positioned between the first and second members and that joins the first and second members, wherein the joining part is provided with: a first joining layer that is formed from a first joining material and that is positioned on the first-member side; a second joining layer that is formed from a second joining material and that is positioned on the second-member side; and a flat plate-form metal layer that is positioned between the first and second joining layers and that has formed therein a plurality of holes that communicate with each other, the metal layer having a first joining material impregnation layer, which is positioned on the first-joining-layer side and in which the plurality of holes are impregnated with the first joining material, a second joining material impregnation layer, which is positioned on the second-joining-layer side and in which the plurality of holes are impregnated with the second joining material, and an empty-hole layer, which is positioned between the first and second joining material impregnation layers and in which the plurality of holes are empty.

JP2000294666	SEMICONDUCTOR PACKAGE JIG AND ITS USE METHOD
JP2016215248	METHOD OF MANUFACTURING ALUMINUM STRUCTURE

ARAKAWA RYUICHI (JP)
TANAKA TOMOO (JP)
YOSHIMOTO OSAMU (JP)

PCT/JP2021/022229

December 30, 2021

June 11, 2021

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NGK SPARK PLUG CO (JP)

B23K1/19; C04B37/02; H01L21/683

JP2008311273A	2008-12-25
JPS60186483A	1985-09-21
JP2020047746A	2020-03-26
JP2020068219A	2020-04-30

TANABE Junya et al. (JP)

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