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Patent Searching and Data


Title:
JOINED BODY AND ELECTROSTATIC CHUCK
Document Type and Number:
WIPO Patent Application WO/2021/261284
Kind Code:
A1
Abstract:
This joined body comprises a plate-form first member, a flat plate-form second member, and a joining part that is positioned between the first and second members and that joins the first and second members, wherein the joining part is provided with: a first joining layer that is formed from a first joining material and that is positioned on the first-member side; a second joining layer that is formed from a second joining material and that is positioned on the second-member side; and a flat plate-form metal layer that is positioned between the first and second joining layers and that has formed therein a plurality of holes that communicate with each other, the metal layer having a first joining material impregnation layer, which is positioned on the first-joining-layer side and in which the plurality of holes are impregnated with the first joining material, a second joining material impregnation layer, which is positioned on the second-joining-layer side and in which the plurality of holes are impregnated with the second joining material, and an empty-hole layer, which is positioned between the first and second joining material impregnation layers and in which the plurality of holes are empty.

Inventors:
ARAKAWA RYUICHI (JP)
TANAKA TOMOO (JP)
YOSHIMOTO OSAMU (JP)
Application Number:
PCT/JP2021/022229
Publication Date:
December 30, 2021
Filing Date:
June 11, 2021
Export Citation:
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Assignee:
NGK SPARK PLUG CO (JP)
International Classes:
B23K1/19; C04B37/02; H01L21/683
Foreign References:
JP2008311273A2008-12-25
JPS60186483A1985-09-21
JP2020047746A2020-03-26
JP2020068219A2020-04-30
Attorney, Agent or Firm:
TANABE Junya et al. (JP)
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