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Title:
JOINT BODY OF TARGET MATERIAL AND BACKING PLATE, AND METHOD FOR MANUFACTURING JOINT BODY OF TARGET MATERIAL AND BACKING PLATE
Document Type and Number:
WIPO Patent Application WO/2020/194789
Kind Code:
A1
Abstract:
This joint body of a target material and a backing plate, has a target material containing Ta and a backing plate joined to the target material, wherein the tensile strength between the target material and the backing plate is 20 kg/mm2 or more, and the average hydrogen content of the target material is 7 vol. ppm or less.

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Inventors:
NAGATSU KOTARO (JP)
YAMADA YUKI (JP)
Application Number:
PCT/JP2019/035045
Publication Date:
October 01, 2020
Filing Date:
September 05, 2019
Export Citation:
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Assignee:
JX NIPPON MINING & METALS CORP (JP)
International Classes:
C23C14/34; B23K20/00; H01L21/285
Domestic Patent References:
WO2012014921A12012-02-02
WO2012014921A12012-02-02
Foreign References:
JP2016191103A2016-11-10
JP2001342506A2001-12-14
JPH1180942A1999-03-26
JPH111766A1999-01-06
JPH01290766A1989-11-22
JPH1180942A1999-03-26
JP2016191103A2016-11-10
Other References:
See also references of EP 3736356A4
Attorney, Agent or Firm:
AXIS PATENT INTERNATIONAL (JP)
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