Title:
LAMB WAVE RESONATOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/035400
Kind Code:
A1
Abstract:
The present application relates to the technical field of acoustic wave resonators, and provides a Lamb wave resonator and a manufacturing method therefor. The Lamb wave resonator comprises a support substrate, a support structure, a piezoelectric thin film, and a top electrode. The support substrate and the piezoelectric thin film are spaced apart. One end of the support structure is provided on a surface of the support substrate, and the other end of the support structure is provided on a first surface of the piezoelectric thin film. The top electrode is provided on a second surface of the piezoelectric thin film facing away from the support substrate. The top electrode and the support structure at least partially overlap in the thickness direction of the piezoelectric thin film. Regarding the Lamb wave resonator, the mechanical stability of the piezoelectric thin film can be improved, and heat dissipation characteristics and power characteristics of the resonator are improved. Because main modal energy of the Lamb wave resonator is mainly concentrated in a portion between electrodes, and spurious modes are generated when an acoustic wave is transmitted to an electrode region and reflected multiple times, providing the support structure facilitates leakage of spurious acoustic wave energy to the support substrate, thereby mitigating the problem that there are many spurious modes.
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Inventors:
ZHANG YI (CN)
WANG QING (CN)
YU HONGYU (CN)
WANG QING (CN)
YU HONGYU (CN)
Application Number:
PCT/CN2021/130100
Publication Date:
March 16, 2023
Filing Date:
November 11, 2021
Export Citation:
Assignee:
UNIV SOUTHERN SCI & TECH (CN)
International Classes:
H03H9/17
Attorney, Agent or Firm:
CHOFN INTELLECTUAL PROPERTY (CN)
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