Title:
LAMINATED FILM
Document Type and Number:
WIPO Patent Application WO/2021/025040
Kind Code:
A1
Abstract:
This laminated film is provided with: a metal film (12) laminated on a base film (11); and a surface-layer oxide film (13) laminated on the metal film (12), wherein the metal film (12) is composed of Ag or an Ag alloy, and the surface-layer oxide film (13) is composed of an oxide including at least 70 atom% in total of one or both of W and Mo in metal components.
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Inventors:
UMEMOTO KEITA (JP)
SUGIUCHI YUKIYA (JP)
KOMIYAMA SHOZO (JP)
OHTOMO TAKESHI (JP)
SUGIUCHI YUKIYA (JP)
KOMIYAMA SHOZO (JP)
OHTOMO TAKESHI (JP)
Application Number:
PCT/JP2020/029928
Publication Date:
February 11, 2021
Filing Date:
August 05, 2020
Export Citation:
Assignee:
MITSUBISHI MATERIALS CORP (JP)
International Classes:
C04B35/495; C23C14/06; C23C14/08; C23C14/14; H01L51/50; H05B33/26
Domestic Patent References:
| WO2015194320A1 | 2015-12-23 |
Foreign References:
| JP2011113758A | 2011-06-09 | |||
| JP2008218396A | 2008-09-18 | |||
| JP2012069286A | 2012-04-05 | |||
| JP2010192117A | 2010-09-02 | |||
| KR20160093132A | 2016-08-08 |
Attorney, Agent or Firm:
MATSUNUMA Yasushi et al. (JP)
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