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Title:
LARGE-STROKE MULTIPLE-DEGREES-OF-FREEDOM NANOSCALE POSITIONING DEVICE AND CONTROL METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2021/217761
Kind Code:
A1
Abstract:
A large-stroke multiple-degrees-of-freedom nanoscale positioning device and a control method thereof, comprising a base (1), wherein the top of the base (1) is connected to one end of an electric cylinder (24) by means of a lower hinge (25) having a self-locking function. The other end of the electric cylinder (24) is connected to one end of a micro-motion driving mechanism (22), and the other end of the micro-motion driving mechanism (22) is connected to the bottom of a workbench (3) by means of an upper hinge (21) having a self-locking function. The positioning device achieves the large-stroke and high-precision positioning of the workbench (3) by means of the electric cylinder (24) and the micro-motion driving mechanism (22), which makes up for the shortcomings in which a traditional positioning device has a high precision but small stroke, or large stroke but low precision. The positioning device has multiple degrees of freedom, and by means of a parallel branch chain mechanism (2), multiple-degrees-of-freedom random orientation adjustment of the workbench (3) is achieved, and various positioning requirements are met. The positioning device has a high degree of automation. The positioning and control over the whole positioning device is achieved by means of a computer, thereby achieving a high efficiency.

Inventors:
ZHOU FENGWEI (CN)
QIAN XIAOMING (CN)
MENG KAI (CN)
Application Number:
PCT/CN2020/091820
Publication Date:
November 04, 2021
Filing Date:
May 22, 2020
Export Citation:
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Assignee:
WUXI FRIEDRICH MEASUREMENT AND CONTROL INSTR CO LTD (CN)
International Classes:
B25J9/00; G12B5/00
Foreign References:
CN104269191A2015-01-07
CN106142054A2016-11-23
CN108481306A2018-09-04
CN101244559A2008-08-20
CN1562578A2005-01-12
CN103878766A2014-06-25
JPH08132363A1996-05-28
Attorney, Agent or Firm:
WUXI DAWEI PATENT TRADE MARK AGENCY(GENERAL PARTNERSHIP) (CN)
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