Title:
LASER APPARATUS WAVELENGTH CONTROL METHOD AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/157839
Kind Code:
A1
Abstract:
This laser apparatus wavelength control method comprises: successively acquiring target wavelength data of pulsed laser light; successively storing the target wavelength data; acquiring a measured wavelength by successively measuring the wavelength of the pulsed laser light; calculating a wavelength deviation using the measured wavelength and the target wavelength data of a time earlier than the time at which the measured wavelength was acquired; and feedback-controlling the wavelength of the pulsed laser light using the wavelength deviation.
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Inventors:
YAMANAKA TAKUMA (JP)
MIYAMOTO HIROTAKA (JP)
MIYAMOTO HIROTAKA (JP)
Application Number:
PCT/JP2019/003041
Publication Date:
August 06, 2020
Filing Date:
January 29, 2019
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/137
Domestic Patent References:
| WO2014192704A1 | 2014-12-04 |
Foreign References:
| JP2018517278A | 2018-06-28 | |||
| US20180159297A1 | 2018-06-07 | |||
| JP2017538963A | 2017-12-28 | |||
| JP2013511842A | 2013-04-04 | |||
| US20020141464A1 | 2002-10-03 | |||
| JP2001307997A | 2001-11-02 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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