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Title:
LASER DEVICE AND LEAK CHECK METHOD FOR LASER DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/065001
Kind Code:
A1
Abstract:
This leak check method for a laser device includes: exposing, in the air, a closed space in which a laser medium gas is accomodated; isolating the closed space from the air after exposing the closed space in the air; and introducing, into the closed space, a neon-containing gas that contains a neon gas; and determining whether the neon gas leaks to the outside of the closed space.

Inventors:
TSUSHIMA HIROAKI (JP)
KAWAGOE YOUSUKE (JP)
TANAKA MAKOTO (JP)
Application Number:
PCT/JP2019/039358
Publication Date:
April 08, 2021
Filing Date:
October 04, 2019
Export Citation:
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Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/036
Domestic Patent References:
WO2017081819A12017-05-18
WO2018047280A12018-03-15
Foreign References:
JP2006013232A2006-01-12
JPH02142558U1990-12-04
JPH09116214A1997-05-02
US20070030876A12007-02-08
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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