Title:
LASER-DRIVEN LIGHT SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/203791
Kind Code:
A1
Abstract:
In this laser-driven light source device (1) a pulsed laser light (3L) is condensed and irradiated into a plasma container (2) having a light-emitting medium enclosed therein to generate a pre-discharge, and a CW laser light (4L) is condensed and irradiated onto the plasma generated by the pre-discharge, thereby generating and maintaining the plasma inside the plasma container (2). The laser-driven light source device (1) is provided with a structure wherein, when the plasma (spark) generated by the pulsed laser light (3L) is generated/maintained by the CW laser light (4L), the spark is not extinguished by the pulsed laser light (3L). The laser-driven light source device is characterized in that, inside the plasma container (2), a light-condensing point (3a) position for the pulsed laser light (3L) and a light-condensing point (4a) position for the CW laser light (4L) are separated in such a manner that the pulsed laser light (3L) does not hit the plasma present at the light-condensing point (4a) position for the CW laser light (4L).
Inventors:
SUMITOMO TAKU (JP)
YOKOTA TOSHIO (JP)
KITAGAWA TETSUYA (JP)
YAMASAKI YU (JP)
YOKOTA TOSHIO (JP)
KITAGAWA TETSUYA (JP)
YAMASAKI YU (JP)
Application Number:
PCT/JP2017/008457
Publication Date:
November 30, 2017
Filing Date:
March 03, 2017
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
H01J65/04
Foreign References:
| JP2011035039A | 2011-02-17 | |||
| JP2009532829A | 2009-09-10 | |||
| US20150049778A1 | 2015-02-19 | |||
| JP2010170994A | 2010-08-05 |
Attorney, Agent or Firm:
ISOHATA Masao (JP)
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