Title:
LASER IRRADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/059872
Kind Code:
A1
Abstract:
[Problem] To provide a laser irradiation device that suppresses the deposition of foreign matter on optical elements. [Solution] A laser irradiation device 1 that comprises: emission optical systems 10, 20, 30 that form a beam B that makes laser light that is generated by a laser oscillator converge at a prescribed beam spot BS and continuously vary the irradiation direction and the like of the beam; and a protection member 70 that is provided between the emission optical systems and the beam spot, protects the emission optical systems from foreign matter that is scattered from the irradiation target side, has an opening 71 through which the beam passes, and moves in association with the variation of the irradiation direction and the like of the beam such that the opening is located on the path of the beam.
Inventors:
MORI DAISUKE (JP)
Application Number:
PCT/JP2020/032821
Publication Date:
April 01, 2021
Filing Date:
August 31, 2020
Export Citation:
Assignee:
TOYOKOH CO LTD (JP)
International Classes:
B23K26/064; B23K26/066; B23K26/082; B23K26/16
Domestic Patent References:
| WO2013133415A1 | 2013-09-12 | |||
| WO2018066286A1 | 2018-04-12 | |||
| WO2016009978A1 | 2016-01-21 |
Foreign References:
| JPH0947888A | 1997-02-18 | |||
| CN206981344U | 2018-02-09 | |||
| JP5574354B2 | 2014-08-20 |
Other References:
See also references of EP 4035821A4
Attorney, Agent or Firm:
INADA Hiroaki et al. (JP)
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