Title:
LASER MACHINING DEVICE AND LASER OUTPUT DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/130953
Kind Code:
A1
Abstract:
A laser machining device (200) is provided with: a device frame (210); a support part (230) for supporting a machining object (1), the support part (230) being attached to the device frame; a laser output part (300) attached to the device frame; and a laser condensing part (400) attached to the device frame so as to be able to move relative to the laser output part. The laser output part has a laser light source for emitting laser light, and the laser condensing part has a reflection-type spatial optical modulator for reflecting laser light while modulating the laser light, a condensing optical system for condensing the laser light on the machining object, and an image-forming optical system for constituting part of a both-side telecentric optical system in which a reflecting surface of the reflection-type spatial optical modulator and an entrance pupil surface of the condensing optical system are in an image-forming relationship.
Inventors:
OKUMA JUNJI (JP)
NAGAO MITSUHIRO (JP)
IGASAKI YASUNORI (JP)
NAGAO MITSUHIRO (JP)
IGASAKI YASUNORI (JP)
Application Number:
PCT/JP2017/002315
Publication Date:
August 03, 2017
Filing Date:
January 24, 2017
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
B23K26/064; H01L21/301; H01S3/00; H01S3/10; B23K26/53
Foreign References:
| JP2010155258A | 2010-07-15 | |||
| JP2011025304A | 2011-02-10 | |||
| JP2015226012A | 2015-12-14 | |||
| JP2014147946A | 2014-08-21 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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