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Title:
LASER SE BATTERY PRODUCTION LINE
Document Type and Number:
WIPO Patent Application WO/2021/032217
Kind Code:
A3
Abstract:
A laser SE battery production line, comprising, sequentially arranged: a laser doper (10), a chain oxidation furnace (20), and a chain etcher (30). Conveyance mechanisms for said three devices are sequentially connected. A silicon wafer can be conveyed in relay by the conveyance mechanisms of the three devices. The silicon wafer output by the laser doper (10) after laser doping treatment can be directly input to the chain oxidation furnace (20), and the silicon wafer output by the chain oxidation furnace (20) after thermal oxidation treatment can be directly input to the chain etcher (30). A silicon wafer in the chain oxidation furnace (20) can be oxidized during a conveyance process of a second conveyance mechanism (26), and thus the chain oxidation furnace can produce continuously, which can greatly increase production capacity. In addition, a quartz boat is not required to be used to bear the silicon wafer, thus being able to eliminate the motion of wafer insertion and picking in a quartz boat, which can greatly reduce the incidence of breakage of silicon wafers.

Inventors:
FU, Liming (Zhejiang University Road Xihu Distric, Hangzhou Zhejiang 0, CN)
REN, Changrui (Loudong StreetTaicang, Jiangsu 0, CN)
WANG, Min (Lvtan Village Pizhou Tow, Pizhou Jiangsu 0, CN)
CHEN, Ying (Jinfeng Village Committee Shezhu Tow, Liyang Jiangsu 0, CN)
Application Number:
CN2020/121202
Publication Date:
April 08, 2021
Filing Date:
October 15, 2020
Export Citation:
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Assignee:
CHANGZHOU SHICHUANG ENERGY CO. LTD (Licheng TownLiyang, Jiangsu 0, CN)
International Classes:
H01L31/18; H01L21/67
Attorney, Agent or Firm:
SUZHOU MAMBO PATENT AGENCY (GENERAL PARTNERSHIP) (JunhuaRoom 607, Building 2, Huijin Kechuang Center, No. 1099 Baodai West Road, High-tech Zon, Suzhou Jiangsu 0, CN)
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