LIGHT-TRANSMITTING SINTERED CERAMIC AND PLASMA-RESISTANT MEMBER

Title:

LIGHT-TRANSMITTING SINTERED CERAMIC AND PLASMA-RESISTANT MEMBER

Document Type and Number:

WIPO Patent Application WO/2021/145449

Kind Code:

A1

Abstract:

A light-transmitting sintered ceramic which has cells each having a diameter of 1-5 μm in a number density in the range of 5 cells/mm3 to 1,300 cells/mm3, has a closed-cell content of 0.001-0.25 vol%, is composed of crystal grains having an average crystal grain diameter of 105-250 μm, has been formed from main ingredients including 24.0-34.0 mol% AlN, and has a content of given impurities less than 40 mass ppm, a given average transmittance of 60% or greater, and a given clarity of 60% or greater.

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Inventors:

OGAWA SHUHEI (JP)
MIYAKAWA NAOMICHI (JP)

Application Number:

PCT/JP2021/001351

Publication Date:

July 22, 2021

Filing Date:

January 15, 2021

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Assignee:

AGC INC (JP)

International Classes:

C04B35/115; C04B35/117

Domestic Patent References:

WO2018168666A1

2018-09-20

Foreign References:

JP2001199761A	2001-07-24
JP2002326862A	2002-11-12
JPH06157132A	1994-06-03

Attorney, Agent or Firm:

EIKOH PATENT FIRM, P.C. (JP)

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