Title:
LIGHT WASHING TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/008365
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a light washing treatment device capable of performing washing treatment on a surface of a template made of quartz glass in a short period of time.
A light washing treatment device according to the present invention is a light washing treatment device that performs washing treatment on a surface of a template made of quartz glass used in nanoimprint with ultraviolet rays, the light washing treatment device being characterized by comprising: a treatment chamber forming material that forms a treatment chamber in which the template to be treated is arranged and to which treatment gas is supplied; a housing provided facing the template arranged in the treatment chamber with a gap formed therebetween and having a window member allowing the ultraviolet rays to pass therethrough; a ultraviolet-ray light source arranged in the housing and irradiating the template with the ultraviolet rays via the window member; and a heating means for heating the template.
Inventors:
YOSHIHARA KEITA (JP)
HIROSE KENICHI (JP)
HIROSE KENICHI (JP)
Application Number:
PCT/JP2017/022318
Publication Date:
January 11, 2018
Filing Date:
June 16, 2017
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
B29C33/72; B08B7/00; B29C59/02; H01L21/027
Foreign References:
| JP2013248841A | 2013-12-12 | |||
| JP2011245384A | 2011-12-08 | |||
| JP2017015770A | 2017-01-19 |
Attorney, Agent or Firm:
OHI, Masahiko (JP)
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