LIGHTING DEVICE FOR PROXIMITY EXPOSURE DEVICE, LED UNIT, PROXIMITY EXPOSURE DEVICE, AND EXPOSURE METHOD OF PROXIMITY EXPOSURE DEVICE

Title:

LIGHTING DEVICE FOR PROXIMITY EXPOSURE DEVICE, LED UNIT, PROXIMITY EXPOSURE DEVICE, AND EXPOSURE METHOD OF PROXIMITY EXPOSURE DEVICE

Document Type and Number:

WIPO Patent Application WO/2021/070643

Kind Code:

A1

Abstract:

The present invention provides a lighting device capable of using, as a light source part, both a mercury lamp and an LED independently. This lighting device is provided with: a first light source part (30) that uses a mercury lamp (31) as a light source; a fly-eye lens (46) that makes light from the first light source part (30) uniform and emits the light; a plurality of reflecting mirrors (40, 41, 50, 51) that each reflect the light from the first light source part (30); a second light source part (61) that uses a plurality of LED elements (62) as a light source; and an LED unit (60) having a moving mechanism (70) that moves the second light source part (61) between an actuation position AP located on a light path EL of the first light source part (30) and a withdrawal position WP apart from the light path EL of the first light source part (30).

Inventors:

MATSUZAKA MASAAKI (JP)
YAMAGUCHI YOICHI (JP)
MATSUSHITA TOMOHISA (JP)
YUKI TAIGO (JP)

Application Number:

PCT/JP2020/036432

Publication Date:

April 15, 2021

Filing Date:

September 25, 2020

Export Citation:

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Assignee:

V TECH CO LTD (JP)

International Classes:

G03F7/20

Domestic Patent References:

WO2012067246A1

2012-05-24

Foreign References:

JP2010118383A	2010-05-27
JP2011203555A	2011-10-13
JP2009098043A	2009-05-07
JP2006110228A	2006-04-27