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Title:
LIQUID DROPLET EJECTION DEVICE, THIN FILM MANUFACTURING METHOD, AND MANUFACTURING METHOD FOR ORGANIC ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/255696
Kind Code:
A1
Abstract:
Provided are: a liquid droplet ejection device capable of ejecting liquid droplets so as to achieve a desired deposition state; and a thin film manufacturing method and a manufacturing method for an organic electronic device which use the liquid droplet ejection device. A liquid droplet ejection device 18A according to an embodiment is provided with: a transport mechanism 20 for transporting a base substrate 10A having a liquid repellent region 12 in a first direction; an ejection head 36 having a plurality of nozzles 42 that are disposed in a second direction crossing the first direction and eject liquid droplets D; and an imaging device 24 that is disposed downstream of the ejection head in the first direction, and images a plurality of ejected liquid droplets D1 which are the plurality of liquid droplets ejected from the ejection head and deposited in the liquid repellent region.

Inventors:
MORISHIMA SHINICHI (JP)
INOUE HIROYASU (JP)
NODA MOTOO (JP)
SHIMOGAWARA MASAYA (JP)
Application Number:
PCT/JP2020/021715
Publication Date:
December 24, 2020
Filing Date:
June 02, 2020
Export Citation:
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Assignee:
SUMITOMO CHEMICAL CO (JP)
International Classes:
B05C11/00; B05C5/00; B05C11/10; B05C13/02; B05D1/26; B05D3/00; H01L51/50; H05B33/02; H05B33/10
Foreign References:
JP2018065111A2018-04-26
JP2017176981A2017-10-05
JP2016022416A2016-02-08
JP2009095740A2009-05-07
JP2016190216A2016-11-10
JP2010217482A2010-09-30
Attorney, Agent or Firm:
NAKAYAMA, Tohru et al. (JP)
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