LIQUID TREATING DEVICE, AND LIQUID TREATING METHOD

Title:

LIQUID TREATING DEVICE, AND LIQUID TREATING METHOD

Document Type and Number:

WIPO Patent Application WO/2003/062504

Kind Code:

A1

Abstract:

A liquid treating device having a light source comprises a base plate holding block for holding a base plate, and a frame body forming a liquid treating tank connected to the base plate and opened at the upper end and having an inner wall surface inclined with respect to the vertical direction of the base plate surface. Since the frame body has the inclined inner wall surface, the radiation light directed from the light source to the base plate can be prevented from casting a shadow over the base plate as it is obstructed by the inner wall surface or the radiation light reflected by this inner wall surface can be prevented from falling on the base plate or from having its uniformity impaired.

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Inventors:

YAGI YASUSHI (JP)
AOKI KAZUTSUGU (JP)
USHIJIMA MITSURU (JP)

Application Number:

PCT/JP2003/000456

Publication Date:

July 31, 2003

Filing Date:

January 21, 2003

Export Citation:

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Assignee:

TOKYO ELECTRON LTD (JP)
YAGI YASUSHI (JP)
AOKI KAZUTSUGU (JP)
USHIJIMA MITSURU (JP)

International Classes:

C25D11/32; C25D17/00; C25D21/00; H01L21/00; H01L21/3063; (IPC1-7): C25D17/00; H01L21/304

Foreign References:

JPH0887956A	1996-04-02
JPH0563075A	1993-03-12

Attorney, Agent or Firm:

Suyama, Saichi (1 Kandata-cho 2-chom, Chiyoda-ku Tokyo, JP)

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