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Title:
MATRIX TYPE PIEZOELECTRIC&sol ELECTROSTRICTIVE DEVICE AND ITS MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2003/028123
Kind Code:
A1
Abstract:
A matrix type piezoelectric&sol electrostrictive device (1) driven by the displacement of a piezoelectric&sol electrostrictive element (4) with piezoelectric&sol electrostrictive elements (31) having the piezoelectric&sol electrostrictive element (4) and at least a pair of electrodes (18, 19) disposed upright on a thick ceramic substrate (2). This matrix type piezoelectric&sol electrostrictive device (1) is characterized by keeping the piezoelectric&sol electrostrictive elements (31) coupled integrally with the ceramic substrate (2) and independently arrayed in two dimensions to form a pair of electrodes (18, 19) on the side face of the piezoelectric&sol electrostrictive element (4). The state of crystal grains of the face with the electrodes (18, 19) out of the side faces of the piezoelectric&sol electrostrictive element (4) shows that 10% or less of crystal grains undergo transcrystalline cracks. A vicinity of the junction of the pieaoelectric&sol electrostrictive element (4) with the ceramic substrate (2) forms a curved face, (13). This constitution provides a low−voltage and large displacement, high response speed, large generation power, excellent mountability, and higher integration.

Inventors:
TAKEUCHI YUKIHISA
WATANABE MASASHI
KIMURA KOJI
KAWAGUCHI TATSUO
Application Number:
PCT/JP2002/008159
Publication Date:
April 03, 2003
Filing Date:
August 09, 2002
Export Citation:
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Assignee:
NGK INSULATORS LTD (JP)
International Classes:
G02B6/12; G02B6/35; G02B26/02; G02B26/08; H01L27/20; H01L29/82; H01L41/04; H01L41/08; H01L41/09; H01L41/18; H01L41/187; H01L41/193; H01L41/22; H01L41/338; H01L41/339; H02N2/00; (IPC1-7): H01L41/09; H01L41/24; G02B26/02; G02B26/08
Foreign References:
US6222303B12001-04-24
JPH03243358A1991-10-30
EP0736386A21996-10-09
JP2000168083A2000-06-20
JPH10278259A1998-10-20
JP2002257845A2002-09-11
Other References:
See also references of EP 1432048A4
Attorney, Agent or Firm:
Watanabe, Kazuhira (No.8 Kikuboshi Tower Building 20-1, Asakusabashi 3-chome Taito-ku Tokyo, JP)
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