Title:
MAGNETIC SENSOR MANUFACTURING METHOD, MAGNETIC SENSOR, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/022640
Kind Code:
A1
Abstract:
A magnetic sensor manufacturing method, a magnetic sensor, and an electronic device. A magnetoresistor array on a growth substrate (1) is combined with a receiving substrate (4); the growth substrate (1) is selectively irradiated by laser from the growth substrate (1) side to peel off the selected magnetoresistors from the growth substrate (1) and transfer same onto the receiving substrate (4); the growth substrate (1) is rotated to a predetermined position, and the magnetoresistor array on the growth substrate (1) is combined with the receiving substrate (4); the growth substrate (1) is selectively irradiated by laser from the growth substrate (1) side to peel off the selected magnetoresistors from the growth substrate (1) and transfer same onto the receiving substrate (4), so as to obtain magnetoresistor patterns having different pinning directions. According to the manufacturing method, the manufacturing cost can be reduced, and magnetoresistors having different pinning directions can be obtained.
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Inventors:
ZOU QUANBO (CN)
LENG QUNWEN (CN)
LENG QUNWEN (CN)
Application Number:
PCT/CN2019/107327
Publication Date:
February 11, 2021
Filing Date:
September 23, 2019
Export Citation:
Assignee:
WEIFANG GOERTEK MICROELECTRONICS CO LTD (CN)
International Classes:
H01L43/12; G01R33/09; H01L43/08
Foreign References:
| JPH1019909A | 1998-01-23 | |||
| CN109888088A | 2019-06-14 | |||
| CN107924866A | 2018-04-17 | |||
| CN105699920A | 2016-06-22 | |||
| US20110018531A1 | 2011-01-27 |
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