Title:
MAGNETIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2023/007989
Kind Code:
A1
Abstract:
[Problem] To provide a magnetic sensor that has little variation in detection sensitivity and is capable of achieving high detection sensitivity. [Solution] A magnetic sensor 1 is provided with a sensor chip 100 and external magnetic bodies 10, 20 having the X-direction be the lengthwise direction. Magnetic body layers 111, 112 arranged in the X-direction with a magnetic gap G2 interposed therebetween, and a magneto-sensitive element R1 having the X-direction be the direction of magnetic sensitivity, are formed on an element formation surface 105 of the sensor chip 100. The external magnetic body 10 has an inner surface 12a which covers the element formation surface 105 so as to overlap the magnetic body layer 111, and an inner surface 11a which covers a side surface 101. The external magnetic body 20 has an inner surface 22a which covers the element formation surface 105 so as to overlap the magnetic body layer 112, and an inner surface 21a which covers a side surface 102. As a result, variation in detection sensitivity does not occur readily given that the external magnetic bodies 10, 20 can be positioned by the side surfaces 101, 102 of the sensor chip 100.
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Inventors:
KUROKI KOJI (JP)
LIN CHENGBIN (JP)
ONODERA IKUHITO (JP)
KAMENO MAKOTO (PH)
LIN CHENGBIN (JP)
ONODERA IKUHITO (JP)
KAMENO MAKOTO (PH)
Application Number:
PCT/JP2022/024685
Publication Date:
February 02, 2023
Filing Date:
June 21, 2022
Export Citation:
Assignee:
TDK CORP (JP)
International Classes:
G01R33/02; G01R33/09
Domestic Patent References:
| WO2018216651A1 | 2018-11-29 |
Foreign References:
| JP2021105601A | 2021-07-26 | |||
| JP2020187084A | 2020-11-19 | |||
| JP2019215311A | 2019-12-19 | |||
| JP2016164549A | 2016-09-08 | |||
| US20100271018A1 | 2010-10-28 |
Attorney, Agent or Firm:
WASHIZU Mitsuhiro et al. (JP)
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