Title:
MANIFOLD FOR CONTROLLING FLOW OF FLUID INCLUDING FLUE GAS
Document Type and Number:
WIPO Patent Application WO/2019/240528
Kind Code:
A1
Abstract:
The present invention relates to a MIMO system comprising manifolds which are capable of controlling the temperature and flow of a fluid including flue gas generated during a semiconductor or display process, wherein each of the manifolds may comprise one supply tube, one bypass tube, and two discharge tubes, or may comprise one supply tube, no bypass tube, and two discharge tubes.
Inventors:
CHOE ICK SUNG (KR)
JUNG JAY (KR)
KIM DUK JUN (KR)
JUNG JAY (KR)
KIM DUK JUN (KR)
Application Number:
PCT/KR2019/007188
Publication Date:
December 19, 2019
Filing Date:
June 14, 2019
Export Citation:
Assignee:
GLOBAL STANDARD TECH CO LTD (KR)
International Classes:
H01L21/67; H01L21/02
Foreign References:
| KR20040088026A | 2004-10-15 | |||
| KR20140144030A | 2014-12-18 | |||
| JP2014036953A | 2014-02-27 | |||
| KR20150032707A | 2015-03-27 | |||
| KR20170112362A | 2017-10-12 |
Attorney, Agent or Firm:
JANG, Nak Yong et al. (KR)
Download PDF:
Previous Patent: METHOD AND APPARATUS FOR HANDLING FREQUENCY PRIORITIES INHERITED FROM OTHER RADIO ACCESS TECHNOLOGIE...
Next Patent: WASHING MACHINE
Next Patent: WASHING MACHINE