Title:
MANUFACTURE OF A POLYMER DEVICE
Document Type and Number:
WIPO Patent Application WO2004100282
Kind Code:
A3
Abstract:
A method of forming a polymer device including the steps of: (i) depositing on a substrate a solution comprising a polymer or oligomer and a crosslinking moiety, to form a layer; (ii) curing the layer formed in step (i) under conditions to form an insoluble crosslinked polymer; characterised in that the crosslinking moiety is present in step (i) in an amount in the range of from 0.05 to 5 mol % based on the total number of moles of repeat units of the polymer or oligomer and the crosslinking moiety in the solution.
Inventors:
CHUA LAY-LAY (SG)
HO PETER KIAN-HOON (SG)
FRIEND RICHARD HENRY (GB)
HO PETER KIAN-HOON (SG)
FRIEND RICHARD HENRY (GB)
Application Number:
PCT/GB2004/002078
Publication Date:
January 20, 2005
Filing Date:
May 12, 2004
Export Citation:
Assignee:
UNIV CAMBRIDGE TECH (GB)
CHUA LAY-LAY (SG)
HO PETER KIAN-HOON (SG)
FRIEND RICHARD HENRY (GB)
CHUA LAY-LAY (SG)
HO PETER KIAN-HOON (SG)
FRIEND RICHARD HENRY (GB)
International Classes:
C07C247/16; C07C311/37; G03F7/004; G03F7/008; G03F7/012; H01L51/30; H01L51/40; G03C1/695; H01L51/00; H01L51/05; (IPC1-7): H01L51/20; G03C1/695; C07C311/37; C07C247/00
Domestic Patent References:
| WO1996020253A1 | 1996-07-04 |
Foreign References:
| US20030048975A1 | 2003-03-13 | |||
| US6096018A | 2000-08-01 | |||
| EP0293911A2 | 1988-12-07 | |||
| US20020106529A1 | 2002-08-08 |
Other References:
CAI, SUI XIONG ET AL: "Bis(perfluorophenyl)azides: efficient crosslinking agents for deep-UV and electron beam lithography", CHEMISTRY OF MATERIALS , 2(6), 631-3 CODEN: CMATEX; ISSN: 0897-4756, 1990, XP001183464
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