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Patent Searching and Data


Title:
MASK MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/154659
Kind Code:
A1
Abstract:
The present invention enables a mask to be moved in a horizontal direction while preventing warping of the mask being held in the horizontal direction and without changing the height of the mask. A plate portion (23) supporting a mask holder portion is mounted on a plurality of first rails (21) which are fixed on an upper face of a surface table along a first direction (X-direction) and which have substantially the same height. Air is ejected toward the first rails so as to form an air layer between the plate portion and the first rails. The direction of movement of the plate portion is regulated by first guide portions (22, 24) so that the plate portion does not move in directions other than the first direction. In addition, the mask holder portion is mounted on a plurality of second rails (31) which are fixed on an upper face of the plate portion along a second direction (Y-direction) and which have substantially the same height. Air is ejected toward the second rails so as to form an air layer between the mask holder portion and the second rails. The direction of movement of the mask holder portion is regulated by second guide portions (32, 33) so that the mask holder portion does not move in directions other than the second direction.

Inventors:
YONEZAWA MAKOTO (JP)
Application Number:
PCT/JP2017/007689
Publication Date:
September 14, 2017
Filing Date:
February 28, 2017
Export Citation:
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Assignee:
V TECH CO LTD (JP)
International Classes:
H01L21/68; G03F7/20
Foreign References:
JP2013538434A2013-10-10
JP2010197538A2010-09-09
JPS5537211U1980-03-10
JP2005085881A2005-03-31
Attorney, Agent or Firm:
SAKATA Yukari (JP)
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