Title:
MEASUREMENT DEVICE, ROBOT SYSTEM, MANAGEMENT METHOD, TARGET MEMBER, AND MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2023/170877
Kind Code:
A1
Abstract:
A measurement device according to the present invention is a measurement device that measures a position of a movable robot, and a position in a rotational direction. The measurement device includes a radiating unit that is capable of radiating measurement light to each of at least three reflecting elements attached to a robot, a photoreceptor that is capable of receiving reflected light reflected by each of the three reflecting elements, and a position acquiring unit that acquires, on the basis of a result of light received by the photoreceptor, positional information relating to a first axis of the robot, positional information relating to a second axis that intersects the first axis, positional information relating to a third axis that intersects the first axis and the second axis, information relating to a position in a rotational direction about the first axis, information relating to a position in a rotational direction about the second axis, and information relating to a position in a rotational direction about the third axis.
Inventors:
MIYAKAWA TOMOKI (JP)
Application Number:
PCT/JP2022/010673
Publication Date:
September 14, 2023
Filing Date:
March 10, 2022
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
B25J9/10; B25J19/02; G01B11/00; G01B11/26
Foreign References:
| JP2012104136A | 2012-05-31 | |||
| JP2019072780A | 2019-05-16 | |||
| US20120168605A1 | 2012-07-05 | |||
| JP2019049481A | 2019-03-28 | |||
| JP2018515774A | 2018-06-14 | |||
| JPH07332923A | 1995-12-22 | |||
| JP2020049633A | 2020-04-02 | |||
| JP2017019072A | 2017-01-26 | |||
| JP2014224790A | 2014-12-04 | |||
| US20080216552A1 | 2008-09-11 | |||
| US4714339A | 1987-12-22 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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