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Patent Searching and Data


Title:
MEDICAL DIAGNOSTIC CHIP AND METHOD FOR MANUFACTURING MEDICAL DIAGNOSTIC CHIP
Document Type and Number:
WIPO Patent Application WO/2021/075846
Kind Code:
A1
Abstract:
Disclosed is a method for manufacturing a medical diagnostic chip by using a mixed lithography method. The method may comprise the steps of: forming a pattern in a first region by using first lithography; and forming a pattern in a second region by using second lithography, wherein the region where the second pattern is formed may include a part of the first region in the area where the first region is adjacent to the second region.

Inventors:
NAM SUNG-WOOK (KR)
BAEK SEUNG HEE (KR)
Application Number:
PCT/KR2020/013998
Publication Date:
April 22, 2021
Filing Date:
October 14, 2020
Export Citation:
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Assignee:
KYUNGPOOK NAT UNIV IND ACADEMIC COOP FOUND (KR)
International Classes:
G03F7/20; B01L3/00; G01N33/48; G03F7/00; H01L21/027
Attorney, Agent or Firm:
KWON, Hyuk-Soo et al. (KR)
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