Title:
MEMS ELEMENT AND SHUTTER DEVICE EMPLOYING SAME
Document Type and Number:
WIPO Patent Application WO/2020/012723
Kind Code:
A1
Abstract:
A displacement enlarging mechanism 510 comprising a MEMS element includes: a base board 200; a fixed portion 1 provided on the base board 200; an opening 2 provided in the fixed portion 1; an actuator 3 of which both ends are connected to the fixed portion 1; a beam 5 of which a base end side is connected to the actuator 3, and which extends parallel to an upper surface of the base board 200; a driven member 7 connected to a distal end side of the beam 5; and a supporting portion 9 which divides the opening 2 in a plan view, while being disposed parallel to the actuator 3 and having both ends thereof connected to the fixed portion 1. The actuator 3, the beam 5, the driven member 7, and the supporting portion 9 are disposed within the opening 2 in a plan view.
Inventors:
KIUCHI MARIO (JP)
Application Number:
PCT/JP2019/011811
Publication Date:
January 16, 2020
Filing Date:
March 20, 2019
Export Citation:
Assignee:
SUMITOMO PRECISION PROD CO (JP)
International Classes:
B81B3/00; G02B26/02; G03B9/10
Domestic Patent References:
| WO2015146145A1 | 2015-10-01 |
Foreign References:
| JP6216485B1 | 2017-10-18 | |||
| JP2017181914A | 2017-10-05 | |||
| JP2005527384A | 2005-09-15 |
Attorney, Agent or Firm:
MAEDA & PARTNERS (JP)
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