Title:
METHOD AND APPARATUS FOR CONTROLLING SEMICONDUCTOR PROCESS, DEVICE AND STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2023/000411
Kind Code:
A1
Abstract:
A method and apparatus for controlling a semiconductor process, a device and a storage medium. The method comprises: parsing wafer batch information to determine a current product batch of a current product (S110); acquiring historical measurement data within a set period (S120); when it is determined that the historical measurement data does not comprise first measurement data of the current product batch, if it is determined according to preset configuration information that the historical measurement data comprises second measurement data of a target product batch, then determining target regulation data according to the preset configuration information and the second measurement data (S130); and controlling production parameters of the current product according to the target regulation data (S140).
Inventors:
WANG YU-HAN (CN)
Application Number:
PCT/CN2021/112218
Publication Date:
January 26, 2023
Filing Date:
August 12, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
G05B19/418
Foreign References:
| TW544741B | 2003-08-01 | |||
| CN111209609A | 2020-05-29 | |||
| US20050114081A1 | 2005-05-26 | |||
| CN102854848A | 2013-01-02 | |||
| CN112071765A | 2020-12-11 | |||
| CN112563152A | 2021-03-26 |
Attorney, Agent or Firm:
BOXIN CHINA INTELLECTUAL PROPERTY (CN)
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