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Patent Searching and Data


Title:
METHOD AND APPARATUS FOR SAVING ENERGY WHILE INCREASING THE CONVEYING SPEED IN VACUUM COATING PLANTS
Document Type and Number:
WIPO Patent Application WO/2016/023533
Kind Code:
A3
Abstract:
Disclosed are an apparatus and a method for saving energy while increasing the conveying speed in vacuum coating plants consisting of a series of sputtering segments (3) and gas separation segments (2) along with a continuous substrate plane (1). Said apparatus has the following features: a) each of the sputtering segments (3) consists of a tank tub (12) inside which a conveying device (11) is located; the flange (6) of the tank is positioned in the immediate vicinity above the substrate plane (1); a cathode bearing block (5), along with targets (8) and gas inlet ducts (10), is located in the tank cover (4) in the immediate vicinity of the substrate together with splash guards (9); b) in the region of the substrate plane (1), the gas separation segments (2) are provided with a tunnel cover (14) that extends along the entire length of the gas separation segment (2); c) sputtering segments (3) and/or gas separation segments (2) are evacuated using one or more vacuum pumps (15), and the air pumped in said process is trapped in an air reservoir (25) having an adjustable volume.

Inventors:
KLEIDETER GERD (DE)
KRISCH THOMAS (DE)
FIUKOWSKI JÖRG (DE)
GAWER OLAF (DE)
Application Number:
PCT/DE2015/000397
Publication Date:
April 07, 2016
Filing Date:
August 05, 2015
Export Citation:
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Assignee:
GRENZEBACH MASCHB GMBH (DE)
International Classes:
C23C14/35; C23C14/56; H01J37/34
Foreign References:
US20080283393A12008-11-20
JP2002081857A2002-03-22
US20050199185A12005-09-15
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