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Title:
METHOD FOR ASSEMBLING PROBE HAVING LARGE LENGTH-TO-DIAMETER RATIO
Document Type and Number:
WIPO Patent Application WO/2021/036463
Kind Code:
A1
Abstract:
Disclosed is a method for assembling a probe having a large length-to-diameter ratio. The probe comprises an atomic force microscopy probe and a nanostructure located at the needle tip. The method for assembling a probe comprises: first, performing hydrophilic treatment on the atomic force microscopy probe, and then placing the atomic force microscopy probe performed hydrophilic treatment into a mixed solution in which a one-dimensional nanomaterial is scattered for assembling to obtain a probe having a large length-to-diameter ratio, wherein probes having different large length-to-diameter ratios can be obtained by adjusting the concentration of the one-dimensional nanomaterial mixed solution. The method for assembling a probe having a large length-to-diameter ratio provided by the present invention is simple and easy to operate, does not require complicated and expensive equipment, saves costs, and has high-precision measurement capability for the measurement of a complicated fine structure having a high aspect ratio. The present invention solves the current problem of being easy to produce an imaging artifact for the imaging of the fine structure having a high aspect ratio by the use of an atomic force ordinary silicon probe.

Inventors:
YANG SHUMING (CN)
CHENG BIYAO (CN)
LI SHAOBO (CN)
ZHANG GUOFENG (CN)
JIANG ZHUANGDE (CN)
Application Number:
PCT/CN2020/098570
Publication Date:
March 04, 2021
Filing Date:
June 28, 2020
Export Citation:
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Assignee:
UNIV XI AN JIAOTONG (CN)
International Classes:
G01Q70/00; B05D1/18; G01B11/02; G01B11/22; G01B11/24; G01Q70/16
Foreign References:
CN110514877A2019-11-29
CN1849181A2006-10-18
CN1849181A2006-10-18
CN110057751A2019-07-26
Other References:
PENG YI-TIAN , HU YUAN-ZHONG , WANG HUI: "Research on Deposition of Carbon Nanotubes on APTES Self-assembled Monolayers", MICROFABRICATION TECHNOLOGY, no. 3, 30 September 2006 (2006-09-30), pages 54 - 57, XP055787263, ISSN: 1003-8213
SLATTERY ASHLEY, SHEARER CAMERON, SHAPTER JOSEPH, QUINTON JAMIE, GIBSON CHRISTOPHER: "Solution Based Methods for the Fabrication of Carbon Nanotube Modified Atomic Force Microscopy Probes", NANOMATERIALS, vol. 7, no. 11, 346, 25 October 2017 (2017-10-25), pages 1 - 13, XP055787266, ISSN: 2079-4991, DOI: 10.3390/nano7110346
Attorney, Agent or Firm:
XI'AN TONG DA PATENT AGENCY CO., LTD. (CN)
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