Title:
METHOD FOR DETERMINING CAUSE OF DEFECT, AND ELECTRONIC DEVICE, STORAGE MEDIUM, AND SYSTEM
Document Type and Number:
WIPO Patent Application WO/2021/142622
Kind Code:
A1
Abstract:
A method for determining the cause of a substrate defect. The method comprises: acquiring production process data of a substrate (S201), wherein the production process data comprises production history data of the substrate and parameter data of at least two production device parameters; acquiring, according to the type of the substrate, a parameter data reference range of the at least two production device parameters corresponding to the type of the substrate (S202); and on the basis of the acquired parameter data of the at least two production device parameters and the parameter data reference range of the at least two production device parameters, determining, from among the at least two production device parameters, a defective production device parameter that deviates from the parameter data reference range thereof (S203). By means of the method, the cause of a substrate defect can be quickly and conveniently evaluated.
Inventors:
WANG HAIJIN (CN)
XUE JING (CN)
XUE JING (CN)
Application Number:
PCT/CN2020/072033
Publication Date:
July 22, 2021
Filing Date:
January 14, 2020
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
BEIJING BOE OPTOELECTRONICS TECH CO LTD (CN)
BEIJING BOE OPTOELECTRONICS TECH CO LTD (CN)
International Classes:
H01L21/66; G01N21/956
Foreign References:
CN105807742A | 2016-07-27 | |||
CN1858727A | 2006-11-08 | |||
CN110108717A | 2019-08-09 | |||
CN103748670A | 2014-04-23 | |||
US20160284579A1 | 2016-09-29 |
Attorney, Agent or Firm:
LIU, SHEN & ASSOCIATES (CN)
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