METHOD OF MAKING A MAGNETIC HEAD

WIPO Patent Application WO2002103687

A3

The magnetic head of the present invention includes a narrow, high aspect ratio P2 pole tip and a high aspect ratio, fine pitch induction coil. Electroplating trenches (120, 128, 134) for the P2 pole tip (140) and the induction coil (170) are fabricated in a single RIE process step, and the P2 pole tip and the induction coil are thereafter separately plated up into their respective trenches to complete the fabrication of these structures. Briefly, following the fabrication of a P1 pole and the deposition of an insulation layer thereon, a patterned P2 pole tip seed layer (96). An etching mask pattern (112) includes both a P2 pole tip trench opening and an induction coil trench opening. Thereafter, in a single RIE etching step, the P2 pole tip trench is etched through the dielectric material down to the seed layer, and the induction coil trench is etched through the dielectric material down to the insulation layer. The P2 pole tip is then electroplated up into its trench. Thereafter, the induction coil is electroplated (170) up into the induction coil trench. A chemical mechanical polishing (CMP) step is next conducted to remove the excess induction coil material (168) and the RIE etching mask. Thereafter, a patterned insulation layer is deposited upon the induction coil, which is followed by the fabrication of a P2 pole yoke (192) thereupon.

HSIAO RICHARD
SANTINI HUGO ALBERTO EMILIO

PCT/GB2002/002660

April 10, 2003

May 29, 2002

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IBM (US)
IBM UK (GB)

G11B5/31; G11B5/012; G11B5/17; (IPC1-7): G11B5/31; G11B5/012

US20010000303A1	2001-04-19
US6198597B1	2001-03-06
US6032353A	2000-03-07
US6204997B1	2001-03-20
US4872079A	1989-10-03

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