Title:
METHOD FOR MANUFACTURING FILM BULK ACOUSTIC RESONATOR, AND FILTER
Document Type and Number:
WIPO Patent Application WO/2022/057766
Kind Code:
A1
Abstract:
The present invention relates to a method for manufacturing a film bulk acoustic resonator, and a filter. The method comprises: forming a first electrode, a piezoelectric layer, and a second electrode; forming, on at least one of the first electrode and the second electrode, an annular groove penetrating through the corresponding electrode; forming, on the electrode having the annular groove, an electrode lead-out structure having an arc-shaped bridge; forming a support layer on the first electrode; patterning the support layer to form a first cavity penetrating through the support layer, the arc-shaped bridge of the electrode lead-out structure being located within the range of the first cavity; providing a first substrate and covering the first cavity; and removing an annular sacrificial protrusion to form an annular gap, the annular gap being opposite the annular groove. In the present invention, the boundary of an effective resonance area is defined by an area where the annular gap of the electrode lead-out structure is located, and an end portion of a corresponding electrode at the boundary of the effective resonance area is in contact with gas in the gap by means of an annular groove, thereby achieving the effect of eliminating boundary clutter of the electrode in the effective resonance area, further increasing the Q value of a resonator.
Inventors:
HUANG HERB HE (CN)
Application Number:
PCT/CN2021/117995
Publication Date:
March 24, 2022
Filing Date:
September 13, 2021
Export Citation:
Assignee:
NINGBO SEMICONDUCTOR INT CORPORATION SHANGHAI BRANCH (CN)
International Classes:
H03H9/17; H03H9/15
Foreign References:
| CN208768044U | 2019-04-19 | |||
| CN105680813A | 2016-06-15 | |||
| US20160204761A1 | 2016-07-14 | |||
| CN101931380A | 2010-12-29 | |||
| CN110829997A | 2020-02-21 | |||
| CN110868177A | 2020-03-06 | |||
| US20150326200A1 | 2015-11-12 |
Attorney, Agent or Firm:
BEIJING SICHUANG DACHENG INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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