Title:
METHOD FOR MANUFACTURING MAGNETIC DISC SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2012/105322
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a magnetic disc substrate enabling embedding of alumina to be reduced. The method for manufacturing a magnetic disc substrate has the following steps (1) through (4); that is, (1) a step for polishing a surface to be polished on a substrate to be polished, the surface being polished by using a polishing liquid composition A containing alumina particles and water; (2) a step for polishing the surface to be polished of the substrate obtained in step (1) by using a polishing liquid composition B containing silica particles and water, the silica particles having an average primary particle diameter (D50) of 5 to 60 nm, and the standard deviation of the primary particle diameter being less than 40 nm; (3) a step for cleaning the substrate obtained in step (2); and (4) a step for polishing the surface to be polished of the substrate obtained in step (3) using a polishing liquid composition C containing silica particles and water.
Inventors:
HAMAGUCHI TAKESHI
Application Number:
PCT/JP2012/050993
Publication Date:
August 09, 2012
Filing Date:
January 18, 2012
Export Citation:
Assignee:
KAO CORP (JP)
HAMAGUCHI TAKESHI
HAMAGUCHI TAKESHI
International Classes:
G11B5/84; B24B37/00; B24B37/10; C09K3/14
Foreign References:
| JP2007168034A | 2007-07-05 | |||
| JP2007168057A | 2007-07-05 | |||
| JP2005063530A | 2005-03-10 | |||
| JPH1110492A | 1999-01-19 |
Attorney, Agent or Firm:
IKEUCHI SATO & PARTNER PATENT ATTORNEYS (JP)
Patent business corporation Ikeuchi and Sato and partners (JP)
Patent business corporation Ikeuchi and Sato and partners (JP)
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Claims: