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Patent Searching and Data


Title:
METHOD FOR MANUFACTURING PLASMA DISPLAY PANEL
Document Type and Number:
WIPO Patent Application WO/2005/006381
Kind Code:
A1
Abstract:
Disclosed is a method for forming a good-quality metal oxide film on a substrate of a plasma display panel. In a step for forming a protective layer (8) composed of an MgO film as a metal oxide film, the film is formed while keeping the vacuum degree in a deposition chamber (21) as the film-forming chamber within the range from 1 × 10-1 Pa to 1 × 10-2 Pa. Consequently, the protective film (8) can be formed at a good film-forming rate, obtaining good film properties. As a result, it becomes possible to produce a plasma display panel with good image display quality.

Inventors:
TAKASE MICHIHIKO
Application Number:
PCT/JP2004/010365
Publication Date:
January 20, 2005
Filing Date:
July 14, 2004
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD (JP)
TAKASE MICHIHIKO
International Classes:
H01J9/02; H01J11/12; H01J11/22; H01J11/24; H01J11/26; H01J11/34; H01J11/40; (IPC1-7): H01J9/02; H01J11/02
Domestic Patent References:
WO2001059173A12001-08-16
Foreign References:
JP2001243886A2001-09-07
JP2003031136A2003-01-31
JP2000129428A2000-05-09
JP2002056773A2002-02-22
Attorney, Agent or Firm:
Iwahashi, Fumio c/o Matsushita Electric Industrial Co. Ltd. (1006, Oaza Kadom, Kadoma-shi Osaka 01, JP)
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