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Title:
METHOD FOR MANUFACTURING SUBSTRATE EQUIPPED WITH TRANSPARENT CONDUCTIVE FILM, SUBSTRATE EQUIPPED WITH TRANSPARENT CONDUCTIVE FILM, AND SOLAR CELL
Document Type and Number:
WIPO Patent Application WO/2019/044840
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a substrate equipped with a transparent conductive film, wherein a sub-nanosecond to nanosecond laser beam is emitted on a transparent conductive film formed on the surface of a substrate so as to form a laser-induced periodic surface structure having a protruding and recessed shape in at least a portion of the transparent conductive film. Preferably, the fluence of the sub-nanosecond to nanosecond laser beam is controlled such that at least a portion of the sub-nanosecond to nanosecond laser beam has a fluence value that falls between a fluence with which it is possible to remove the transparent conductive film and a fluence with which it is impossible to remove the transparent conductive film.

Inventors:
IWAMA MASAKI (JP)
Application Number:
PCT/JP2018/031781
Publication Date:
March 07, 2019
Filing Date:
August 28, 2018
Export Citation:
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Assignee:
FURUKAWA ELECTRIC CO LTD (JP)
International Classes:
H01B13/00; B23K26/00; B23K26/351; B32B7/02; B32B38/18; H01B5/14; H05K3/08; H01L31/0224
Foreign References:
JP2012204646A2012-10-22
JP2016192392A2016-11-10
JP2016190392A2016-11-10
JP2016190392A2016-11-10
Other References:
See also references of EP 3678150A4
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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