Title:
METHOD FOR PRODUCING COMPOSITION FOR NANOIMPRINT INTERMEDIATE LAYER FORMATION, METHOD FOR PRODUCING LAMINATE, METHOD FOR PRODUCING IMPRINT PATTERN, AND METHOD FOR PRODUCING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/065359
Kind Code:
A1
Abstract:
Provided are: a method for producing a composition for nanoimprint intermediate layer formation, the method including a step for filtering a precursor composition 1 including a resin having a polymerizable group by means of a filter, a step for forming a precursor composition 2 by adding a solvent to the precursor composition 1 after the first filtration step, and a step for filtering the precursor composition 2 by means of a filter, wherein the proportion of total solid content in the obtained composition is 0.1-1.0 mass%; a method for producing a laminate using the composition for intermediate layer formation; a method for producing an imprint pattern using the laminate; and a method for producing a device, the method including the method for producing an imprint pattern.
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Inventors:
SHIMOJU NAOYA (JP)
HAKAMATA AKIHIRO (JP)
HAKAMATA AKIHIRO (JP)
Application Number:
PCT/JP2021/034786
Publication Date:
March 31, 2022
Filing Date:
September 22, 2021
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
H01L21/027; B29C59/02
Domestic Patent References:
| WO2018230488A1 | 2018-12-20 |
Foreign References:
| JP2012169462A | 2012-09-06 |
Attorney, Agent or Firm:
SIKs & Co. (JP)
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