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Patent Searching and Data


Title:
METHOD OF PRODUCING ELECTROSTATIC CHUCKS AND METHOD OF PRODUCING CERAMIC HEATERS
Document Type and Number:
WIPO Patent Application WO/2002/091458
Kind Code:
A1
Abstract:
A method of producing electrostatic chucks or ceramic heaters, wherein the chucking force of the produced electrostatic chuck or the heating value of the ceramic heater does not locally vary, making it possible to uniformly attract or uniformly heat semiconductor wafers, characterized by comprising the steps of printing a conductive paste for electrodes or an electrically conductive paste for heating resistors on a green sheet whose surface roughness is 200 $g(m)m or less in terms of Rmax, then stacking another green sheet on the first-mentioned green sheet to form a laminated body, and sintering the same.

Inventors:
HIRAMATSU YASUJI (JP)
ITO YASUTAKA (JP)
Application Number:
PCT/JP2001/003679
Publication Date:
November 14, 2002
Filing Date:
April 27, 2001
Export Citation:
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Assignee:
IBIDEN CO LTD (JP)
HIRAMATSU YASUJI (JP)
ITO YASUTAKA (JP)
International Classes:
B23Q3/15; B23B5/22; B28B11/00; C04B35/00; C04B35/117; C04B35/581; C04B35/622; C04B35/645; H01C17/065; H01C17/28; H01L21/00; H01L21/683; H02N13/00; H05B3/14; H05B3/16; H05B3/20; H05B3/68; (IPC1-7): H01L21/68; H05B3/10; H05B3/16; H05B3/20
Foreign References:
JP2000252353A2000-09-14
JPH11273837A1999-10-08
Attorney, Agent or Firm:
Yasutomi, Yasuo (Nishinakajima 5-chome Yodogawa-ku Osaka-shi, Osaka, JP)
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