Title:
METHOD FOR REGENERATING POLISHING AGENT, AND POLISHING AGENT RECYCLING TREATMENT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2020/145121
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing: a method for regenerating a polishing agent, which can be employed for the polishing of a chemically strengthened glass, and whereby it becomes possible to remove a K2O-containing glass component from a processed polishing agent slurry with high efficiency, and to achieve the efficient separation of an object to be polished and a stabilized polishing rate, and to prevent the deterioration in quality of a polished object due to scratches or the like on the polished object; and a polishing agent recycling treatment system. The method for regenerating a polishing agent according to the present invention is one in which a constituent component of an object to be polished is removed from a slurry of a polishing agent and then the polishing agent is recovered and regenerated, the method being characterized by comprising at least a polishing processing step, a polishing agent slurry feeding step, a polishing agent slurry recycling step and a precipitation/separation/concentration step in this order, wherein a polishing agent slurry having a K2O concentration of 0.05 to 1.0% by mass in the polishing agent slurry feeding step is diluted 5- to 50-folds by the addition of water in the polishing agent slurry recycling step or the precipitation/separation/concentration step.
Inventors:
MIZOGUCHI KEISUKE (JP)
XUE JING (JP)
TSUKIGATA FUMIKO (JP)
MAEZAWA AKIHIRO (JP)
XUE JING (JP)
TSUKIGATA FUMIKO (JP)
MAEZAWA AKIHIRO (JP)
Application Number:
PCT/JP2019/050487
Publication Date:
July 16, 2020
Filing Date:
December 24, 2019
Export Citation:
Assignee:
KONICA MINOLTA INC (JP)
International Classes:
B24B57/00; B24B37/00; C09G1/02; C09K3/14; H01L21/304
Domestic Patent References:
| WO2014017531A1 | 2014-01-30 | |||
| WO2014178280A1 | 2014-11-06 |
Foreign References:
| JP2015033735A | 2015-02-19 | |||
| JP2011040144A | 2011-02-24 | |||
| JP2005515950A | 2005-06-02 | |||
| JP2003193038A | 2003-07-09 |
Attorney, Agent or Firm:
KOYO INTERNATIONAL PATENT FIRM (JP)
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