Title:
MICROSTRUCTURE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2021/090706
Kind Code:
A1
Abstract:
The present invention relates to a microstructure 20 including holes 22 on the surface or the inside thereof, the microstructure 20 being a sheet containing an energy ray-active resin 21, the holes 22 arranged in a vertical direction being formed therein, the holes 22 being shaped in a forming pattern with a Talbot distance defined by (expression 1), and shaped with periodicity in a planar direction. Note that ZT is a Talbot distance (nm), n is a refractive index, d is a pitch distance (nm), and λ is a light wavelength (nm). Consequently, provided is a three-dimensional structure which can be subjected to periodic fine forming process by controlling even the inside of the structure. (Expression 1) ZT = (2nd2)/λ
Inventors:
MIZUTANI YASUHIRO (JP)
TAKAYA YASUHIRO (JP)
NAKANISHI HIROKI (JP)
EZAKI RYU (JP)
MAKIURA YOSHIHIKO
TAKAYA YASUHIRO (JP)
NAKANISHI HIROKI (JP)
EZAKI RYU (JP)
MAKIURA YOSHIHIKO
Application Number:
PCT/JP2020/039865
Publication Date:
May 14, 2021
Filing Date:
October 23, 2020
Export Citation:
Assignee:
UNIV OSAKA (JP)
KURASHIKI BOSEKI KK (JP)
KURASHIKI BOSEKI KK (JP)
International Classes:
G03F7/20; G02B1/02; G02B5/00
Domestic Patent References:
| WO2016190247A1 | 2016-12-01 | |||
| WO2015008731A1 | 2015-01-22 | |||
| WO2013029985A2 | 2013-03-07 | |||
| WO2016190247A1 | 2016-12-01 |
Foreign References:
| JP2007523468A | 2007-08-16 | |||
| JP2013016696A | 2013-01-24 | |||
| JP2013161919A | 2013-08-19 | |||
| JP2006330085A | 2006-12-07 | |||
| JP2011114125A | 2011-06-09 | |||
| JP2015169803A | 2015-09-28 | |||
| JP2006343671A | 2006-12-21 |
Other References:
NAKANISHI, HIROKI ET AL.: "Fabrication of 3D Nano-Periodic Structure Using Multiple Exposure Lithography by Talbot Effect", JOURNAL OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING, vol. 85, no. 8, 5 August 2019 (2019-08-05), pages 710 - 716, XP055821511
NAKANISHI, HIROKI; MIZUTANI, YASUHIRO; TAKAYA, YASUHIRO: "L21 Large-area nanofabrication by three-dimensional lithography using Talbot effect (2nd report), Fabrication of three-dimensional nano periodic structure using multiple exposure", PROCEEDINGS OF THE 2019 JSPE SPRING CONFERENCE, JAPAN SOCIETY FOR PRECISION ENGINEERING; MARCH 13-15, 2019, 4 September 2019 (2019-09-04) - 15 March 2019 (2019-03-15), pages 804 - 805, XP009535474, DOI: 10.11522/pscjspe.2019S.0_804
See also references of EP 4057067A4
NAKANISHI, HIROKI; MIZUTANI, YASUHIRO; TAKAYA, YASUHIRO: "L21 Large-area nanofabrication by three-dimensional lithography using Talbot effect (2nd report), Fabrication of three-dimensional nano periodic structure using multiple exposure", PROCEEDINGS OF THE 2019 JSPE SPRING CONFERENCE, JAPAN SOCIETY FOR PRECISION ENGINEERING; MARCH 13-15, 2019, 4 September 2019 (2019-09-04) - 15 March 2019 (2019-03-15), pages 804 - 805, XP009535474, DOI: 10.11522/pscjspe.2019S.0_804
See also references of EP 4057067A4
Attorney, Agent or Firm:
IKEUCHI & PARTNERS (JP)
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