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Title:
MOBILE UNIT APPARATUS, EXPOSURE APPARATUS, METHOD FOR MANUFACTURING FLAT PANEL DISPLAY, METHOD FOR MANUFACTURING DEVICE, AND METHOD FOR DRIVING MOBILE UNIT
Document Type and Number:
WIPO Patent Application WO/2018/181912
Kind Code:
A1
Abstract:
A substrate stage apparatus (20) comprising: a fine stage (24); an X coarse stage (34); a Y coarse stage (32); an actuator unit (70X1) including a voice coil motor (72X) whereby a thrust that moves the X coarse stage relative to the Y coarse stage is imparted to the fine stage as a first thrust, and an air actuator (74X) whereby a thrust is imparted to the fine stage as a second thrust greater than the first thrust, the actuator unit moving the fine stage and the X coarse stage relative to the Y coarse stage; and a control system for controlling the voice coil motor and the air actuator and controlling at least one actuator from among the voice coil motor and the air actuator on the basis of the thrust required when the fine stage and the X coarse stage are moved relative to the Y coarse stage.

Inventors:
HARA ATSUSHI (JP)
SAKATA KOICHI (JP)
HASHIBA SEIJI (JP)
Application Number:
PCT/JP2018/013656
Publication Date:
October 04, 2018
Filing Date:
March 30, 2018
Export Citation:
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Assignee:
NIKON CORP (JP)
International Classes:
G05D3/12; G03F7/20; G05D3/00; H01L21/68
Foreign References:
JP2005251788A2005-09-15
JP2014090198A2014-05-15
JP2004104023A2004-04-02
JP2004221251A2004-08-05
JP2000106344A2000-04-11
Attorney, Agent or Firm:
TATEISHI, Atsuji (JP)
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