Title:
MULTI-POSITION PROCESSING APPARATUS AND MULTI-POSITION PROCESSING METHOD FOR SILICON BOULE
Document Type and Number:
WIPO Patent Application WO/2017/202245
Kind Code:
A1
Abstract:
A multi-position processing apparatus for a silicon boule. The apparatus comprising: a machine base (1) provided with a silicon boule processing platform; a silicon boule loading and unloading device (2) for loading and unloading a silicon boule at a pre-treatment area of the silicon boule processing platform; a first processing device (3) for performing a first processing operation on the silicon boule at a first processing area of the silicon boule processing platform; a second processing device (4) for performing a second processing operation on the silicon boule at a second processing area of the silicon boule processing platform; and a silicon boule transfer device (5) for transferring the silicon boule between the pre-treatment area, the first processing area, and the second processing area. The multi-position processing apparatus combines a plurality of processing devices, allowing the apparatus to automatically perform multiple processing tasks. The invention thereby reduces labor costs, increases production efficiency, and improves processing quality. The invention further provides a multi-position processing method for a silicon boule.
Inventors:
LU JIANWEI (CN)
Application Number:
PCT/CN2017/085048
Publication Date:
November 30, 2017
Filing Date:
May 19, 2017
Export Citation:
Assignee:
SHANGHAI NISSIN MACHINE TOOL CO LTD (CN)
International Classes:
B28D5/00
Foreign References:
| CN105538112A | 2016-05-04 | |||
| CN205630235U | 2016-10-12 | |||
| CN105835247A | 2016-08-10 | |||
| CN105946126A | 2016-09-21 | |||
| CN106181610A | 2016-12-07 | |||
| CN205631053U | 2016-10-12 | |||
| CN205631054U | 2016-10-12 | |||
| CN206029479U | 2017-03-22 | |||
| CN201895253U | 2011-07-13 | |||
| US20140080386A1 | 2014-03-20 |
Attorney, Agent or Firm:
SHANGHAI DIANSHI PARTNERS, P.C. (CN)
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