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Title:
MULTILAYER BODY AND METHOD FOR PRODUCING FLEXIBLE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/018994
Kind Code:
A1
Abstract:
The present invention provides a multilayer body of an inorganic substrate and a highly heat-resistant film, wherein the surface of the inorganic substrate is sufficiently smooth after removal of the highly heat-resistant film from the multilayer body, and the inorganic substrate is re-usable. A first multilayer body of a first highly heat-resistant film and an inorganic substrate, said first multilayer body using substantially no adhesive and having the features (1) to (4) described below. (1) The tensile elastic modulus of the first highly heat-resistant film is 4 GPa or more. (2) The bonding strength between the first highly heat-resistant film and the inorganic substrate is 0.3 N/cm or less. (3) The surface roughness Ra of a surface of the first highly heat-resistant film, said surface being in contact with the inorganic substrate, is 5 nm or less. (4) The surface roughness Ra of the surface of the inorganic substrate after removal of the first highly heat-resistant film from the first multilayer body is 3 nm or less.

Inventors:
TOKUDA KAYA (JP)
OKUYAMA TETSUO (JP)
MAEDA SATOSHI (JP)
WATANABE NAOKI (JP)
YONEMUSHI HARUMI (JP)
MIZUGUCHI DENICHIROU (JP)
Application Number:
PCT/JP2021/021947
Publication Date:
January 27, 2022
Filing Date:
June 09, 2021
Export Citation:
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Assignee:
TOYO BOSEKI (JP)
International Classes:
B32B17/10; B32B15/08; B32B18/00; B32B27/00; G09F9/00; G09F9/30
Domestic Patent References:
WO2020039928A12020-02-27
WO2012050072A12012-04-19
Foreign References:
JP2016120663A2016-07-07
JP2017124587A2017-07-20
JP2013010342A2013-01-17
JP2016083926A2016-05-19
JP2007512568W
JP2012189974A2012-10-04
JP2014086451A2014-05-12
JP2014120664A2014-06-30
JP2014100722A2014-06-05
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