Title:
NANO-BUBBLE-CONTAINING LIQUID DISPERSION OF INORGANIC OXIDE FINE PARTICLES, ABRASIVE CONTAINING SAME, AND PRODUCTION METHODS THEREOF
Document Type and Number:
WIPO Patent Application WO/2018/216218
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing a production method for a nano-bubble-containing liquid dispersion of inorganic oxide fine particles which has excellent concentration stability in a process of using the liquid dispersion as an abrasive. The problem is solved by a production method for a nano-bubble-containing liquid dispersion of inorganic oxide fine particles, the method comprising a step for mixing a solution that contains: an inorganic oxide fine particle liquid dispersion containing fine particles having an average particle size of 1-500 nm; and a nano-bubble aqueous solution containing nano-bubbles having an average bubble diameter of 50-500 nm, while the solution is kept at 5-80ºC.
Inventors:
KOMATSU MICHIO (JP)
NISHIDA HIROYASU (JP)
NAKAYAMA KAZUHIRO (JP)
IWASAKI YUKIHIRO (JP)
NISHIDA HIROYASU (JP)
NAKAYAMA KAZUHIRO (JP)
IWASAKI YUKIHIRO (JP)
Application Number:
PCT/JP2017/019791
Publication Date:
November 29, 2018
Filing Date:
May 26, 2017
Export Citation:
Assignee:
JGC CATALYSTS & CHEMICALS LTD (JP)
International Classes:
C09K3/14; B24B37/00; C01F17/235; H01L21/304
Domestic Patent References:
| WO2015064159A1 | 2015-05-07 |
Foreign References:
| JP2011005584A | 2011-01-13 | |||
| JP2008235357A | 2008-10-02 | |||
| JP2009111094A | 2009-05-21 | |||
| JP2010042338A | 2010-02-25 | |||
| JP2009111095A | 2009-05-21 | |||
| JP2015186838A | 2015-10-29 | |||
| JP6141482B1 | 2017-06-07 |
Attorney, Agent or Firm:
MIGITA, Shunsuke et al. (JP)
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