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Patent Searching and Data


Title:
NANO-GEOMETRIC STANDARD TEMPLATE FOR CALIBRATION AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2020/220931
Kind Code:
A1
Abstract:
A nano-geometric standard template for calibration, comprising a substrate (1), a first thin film (5) and a nano-geometric structure (4) on the substrate (1), the first thin film (5) being provided on a surface of the nano-geometric structure (4). Also provided is a preparation method for a nano-geometric standard template for calibration, comprising: first preparing a nano-geometric structure (4) on a substrate (1); then depositing a first thin film (5) on a surface of the nano-geometric structure (4), and modulating the length, the line width and the duty ratio of the nano-geometric structure (4) by means of controlling the thickness of the first thin film (5) so as to obtain a nano-geometric standard template for calibration. The nano-geometric standard template is applicable to the calibration and tracing of micro-nano measurement instruments such as an atomic force microscope, a white light interference microscope and a scanning probe microscope, and the feature size of the nano-geometric standard template can be rapidly and precisely adjusted.

Inventors:
WANG CHENYING (CN)
JIANG ZHUANGDE (CN)
LIN QIJING (CN)
LI LEI (CN)
LIU MING (CN)
ZHANG YIJUN (CN)
HAN FENG (CN)
Application Number:
PCT/CN2020/083221
Publication Date:
November 05, 2020
Filing Date:
April 03, 2020
Export Citation:
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Assignee:
UNIV XI AN JIAOTONG (CN)
International Classes:
B82B1/00; B82B3/00
Foreign References:
CN101598645A2009-12-09
CN108474784A2018-08-31
CN106842814A2017-06-13
US5599464A1997-02-04
US20130017323A12013-01-17
CN102105963A2011-06-22
CN102723418A2012-10-10
CN110054150A2019-07-26
Attorney, Agent or Firm:
XI'AN TONG DA PATENT AGENCY CO., LTD. (CN)
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