Title:
NANO-GEOMETRIC STANDARD TEMPLATE FOR CALIBRATION AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2020/220931
Kind Code:
A1
Abstract:
A nano-geometric standard template for calibration, comprising a substrate (1), a first thin film (5) and a nano-geometric structure (4) on the substrate (1), the first thin film (5) being provided on a surface of the nano-geometric structure (4). Also provided is a preparation method for a nano-geometric standard template for calibration, comprising: first preparing a nano-geometric structure (4) on a substrate (1); then depositing a first thin film (5) on a surface of the nano-geometric structure (4), and modulating the length, the line width and the duty ratio of the nano-geometric structure (4) by means of controlling the thickness of the first thin film (5) so as to obtain a nano-geometric standard template for calibration. The nano-geometric standard template is applicable to the calibration and tracing of micro-nano measurement instruments such as an atomic force microscope, a white light interference microscope and a scanning probe microscope, and the feature size of the nano-geometric standard template can be rapidly and precisely adjusted.
Inventors:
WANG CHENYING (CN)
JIANG ZHUANGDE (CN)
LIN QIJING (CN)
LI LEI (CN)
LIU MING (CN)
ZHANG YIJUN (CN)
HAN FENG (CN)
JIANG ZHUANGDE (CN)
LIN QIJING (CN)
LI LEI (CN)
LIU MING (CN)
ZHANG YIJUN (CN)
HAN FENG (CN)
Application Number:
PCT/CN2020/083221
Publication Date:
November 05, 2020
Filing Date:
April 03, 2020
Export Citation:
Assignee:
UNIV XI AN JIAOTONG (CN)
International Classes:
B82B1/00; B82B3/00
Foreign References:
CN101598645A | 2009-12-09 | |||
CN108474784A | 2018-08-31 | |||
CN106842814A | 2017-06-13 | |||
US5599464A | 1997-02-04 | |||
US20130017323A1 | 2013-01-17 | |||
CN102105963A | 2011-06-22 | |||
CN102723418A | 2012-10-10 | |||
CN110054150A | 2019-07-26 |
Attorney, Agent or Firm:
XI'AN TONG DA PATENT AGENCY CO., LTD. (CN)
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