Title:
NANOIMPRINT METHOD AND APPARATUS
Document Type and Number:
WIPO Patent Application WO/2007/020962
Kind Code:
A1
Abstract:
Provided is a nanoimprint method for transferring a pattern formed on the surface of
a mold, to a transfer layer formed on the partial or whole surface of a substrate of
a generally cylindrical or columnar shape. Also provided is a nanoimprint apparatus
comprising a first jig for contacting with the substrate, a second jig for supporting
the first jig rotatably, a pushing portion connected to the second jig for pushing
the substrate onto the mold through the first jig and the second jig, and a movable
holding portion for holding the mold and for moving the mold in a direction generally
perpendicular to the pushing force. The apparatus transfers a pattern formed
on the surface of the mold, to a transfer layer formed on the partial or whole side
face of the generally cylindrical or columnar substrate.
Inventors:
NAKAMURA KAZUYA (JP)
IMAIZUMI NOBUO (JP)
HIYAMA YOSHIHITO (JP)
MAEDA RYUTARO (JP)
GOTO HIROSHI (JP)
IMAIZUMI NOBUO (JP)
HIYAMA YOSHIHITO (JP)
MAEDA RYUTARO (JP)
GOTO HIROSHI (JP)
Application Number:
PCT/JP2006/316144
Publication Date:
February 22, 2007
Filing Date:
August 17, 2006
Export Citation:
Assignee:
NAMIKI PRECISION JEWEL CO LTD (JP)
NAKAMURA KAZUYA (JP)
IMAIZUMI NOBUO (JP)
HIYAMA YOSHIHITO (JP)
MAEDA RYUTARO (JP)
GOTO HIROSHI (JP)
NAKAMURA KAZUYA (JP)
IMAIZUMI NOBUO (JP)
HIYAMA YOSHIHITO (JP)
MAEDA RYUTARO (JP)
GOTO HIROSHI (JP)
International Classes:
B82B3/00; B29C33/38; B29C59/04; B81C99/00; H01L21/027; H05K3/10
Foreign References:
| JP2000147229A | 2000-05-26 | |||
| JP2000141481A | 2000-05-23 | |||
| JP2003001706A | 2003-01-08 | |||
| JP2005012040A | 2005-01-13 | |||
| JPH08276494A | 1996-10-22 | |||
| JPH05222504A | 1993-08-31 | |||
| JP2002001812A | 2002-01-08 | |||
| JP2003025431A | 2003-01-29 | |||
| JPH10109314A | 1998-04-28 | |||
| JP2004288845A | 2004-10-14 |
Other References:
TAN H. ET AL.: "Roller nanoimprint lithography", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. B, AMERICAN VACUUM SOCIETY, vol. 16, no. 6, 1998, pages 3926 - 3928, XP012007312
Attorney, Agent or Firm:
NAMIKI SEIMITSU HOUSEKI KABUSHIKIKAISHA (Shinden 3-Chome Adachi-ku Tokyo, 11, JP)
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